Patent Assignment
Reel/Frame 059661/0239
Assignment of Assignor's Interest
Recorded: 2022-04-08
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Patterning Features with Metal Based Resists