Patent Assignment
Reel/Frame 059784/0912
Assignment of Assignor's Interest
Recorded: 2022-05-02
Pages: 4
Assignors
GOORDEN, SEBASTIANUS ADRIANUS
Executed: 2019-01-07
HUISMAN, SIMON REINALD
Executed: 2019-01-07
SOKOLOV, SERGEI
Executed: 2019-01-07
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Sensor, Illumination System and Method of Generating Measurement Illumination with a Configurable Illumination Spot Diameter