Patent Assignment
Reel/Frame 059804/0979
Assignment of Assignor's Interest
Recorded: 2022-04-26
Pages: 3
Assignor
EGASHIRA, SHINICHI
Executed: 2022-03-29
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Processing System, Processing Method, Measurement Apparatus, Substrate Processing Apparatus and Article Manufacturing Method