Patent Assignment
Reel/Frame 059960/0690
Assignment of Assignor's Interest
Recorded: 2022-05-19
Pages: 8
Assignors
KAGAYA, MUNEHITO
Executed: 2022-05-09
MITSUNARI, TADASHI
Executed: 2022-05-09
ONODA, HIROYUKI
Executed: 2022-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Device