Patent Assignment
Reel/Frame 059971/0585
Assignment of Assignor's Interest
Recorded: 2022-05-20
Pages: 3
Assignor
MATSUYAMA, NOBORU
Executed: 2020-06-23
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method to Suppress Alteration of Processing Liquid