Patent Assignment
Reel/Frame 060000/0273
Assignment of Assignor's Interest
Recorded: 2022-05-24
Pages: 8
Assignors
LUBASHEVSKY, YUVAL
Executed: 2022-04-18
GDOR, ITAY
Executed: 2022-04-18
NEGRI, DARIA
Executed: 2022-04-25
HAJAJ, EITAN
Executed: 2022-05-16
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Scanning Overlay Metrology Using Overlay Targets Having Multiple Spatial Frequencies