Patent Assignment
Reel/Frame 060037/0993
Assignment of Assignor's Interest
Recorded: 2022-05-27
Pages: 3
Assignee
LPE S.P.A.
VIA FALZAREGO 8, BARANZATE (MI), I-20021, ITALY
Covered Property
(1)
Substrate Support Device for a Reaction Chamber of an Epitaxial Reactor with Gas Flow Rotation, Reaction Chamber and Epitaxial Reactor