Patent Assignment
Reel/Frame 060065/0766
Assignment of Assignor's Interest
Recorded: 2022-06-01
Pages: 3
Assignors
HIGUCHI, TAKESHI
Executed: 2020-10-21
KATO, HIROKAZU
Executed: 2022-05-26
OKABE, KASUMI
Executed: 2020-10-21
Assignee
KIOXIA CORPORATION
1-21, SHIBAURA 3-CHOME, MINATO-KU, TOKYO, 108-0023, JAPAN
Covered Property
(1)
Imprinting Method, Semiconductor Device Manufacturing Method and Imprinting Apparatus