Imprinting method, semiconductor device manufacturing method and imprinting apparatus
An imprinting method includes dispensing a first liquid on a first region of a substrate. The first liquid is a photocurable resist precursor. A second liquid is dispensed on a second region of the substrate. The second region is adjacent to and surrounding the first region. The second liquid is non-photocurable as dispensed. The first region is then irradiated with light while a patterned template is being pressed against the first liquid. The light cures the first liquid and forms a resist pattern corresponding to the patterned template. The patterned template and the substrate are then separated from each other. The second liquid is then selectively removed from the substrate while leaving the resist pattern on the substrate.
1. An imprinting method, comprising;
dispensing a first liquid on a first region of a substrate, the first liquid being a photocurable resist precursor, and the first region being an inner portion of a shot region that is one of a plurality of die areas on the substrate;
dispensing a second liquid on a second region of the substrate, the second region being adjacent to and surrounding the first region, the second region being an outer portion of the shot region, and the second liquid being non-photocurable as dispensed;
irradiating the first region with light while pressing a patterned template against the first liquid to cure the first liquid and form a resist pattern corresponding to the patterned template;
separating the patterned template and the substrate; and
selectively removing the second liquid from the substrate while leaving the resist pattern on the substrate.
2. The imprinting method according to claim 1 , wherein the second liquid is coated on the substrate before the dispensing of the first liquid.
3. The imprinting method according to claim 2 , wherein the second liquid is a saturated hydrocarbon.
4. The imprinting method according to claim 2 , wherein the second liquid is an unsaturated hydrocarbon.
5. The imprinting method according to claim 4 , wherein the unsaturated hydrocarbon is an oligomer having a polymerizable end group.
6. The imprinting method according to claim 1 , wherein the second liquid is a saturated hydrocarbon.
7. The imprinting method according to claim 1 , wherein the second liquid is an unsaturated hydrocarbon.
8. The imprinting method according to claim 7 , wherein the second liquid includes a photopolymerization inhibitor.
9. The imprinting method according to claim 7 , wherein the unsaturated hydrocarbon is an oligomer having a polymerizable end group.
10. The imprinting method according to claim 1 , wherein the second liquid includes a photopolymerization inhibitor.
11. The imprinting method according to claim 1 , wherein the second liquid is selectively removed from the substrate by vacuum-assisted evaporation.
12. The imprinting method according to claim 1 , wherein the second liquid is selectively removed from the substrate in a solvent wash process.