Patent Assignment
Reel/Frame 060089/0001
Assignment of Assignor's Interest
Recorded: 2022-06-02
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Removing Material Overburden via Enhanced Freeze-Less Anti-Spacer Formation Using a Bilayer System