Patent Assignment
Reel/Frame 060145/0738
Assignment of Assignor's Interest
Recorded: 2022-06-09
Pages: 8
Assignors
NAKAMURA, KAZUKI
Executed: 2022-05-24
ISHII, JUNICHI
Executed: 2022-05-27
SHINOHARA, TOMOYUKI
Executed: 2022-05-27
TAKAHASHI, TAKUMA
Executed: 2022-05-27
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Cleaning Device and Substrate Cleaning Method