Patent Assignment
Reel/Frame 060155/0260
Assignment of Assignor's Interest
Recorded: 2022-06-09
Pages: 12
Assignors
CHOI, YOON SEOK
Executed: 2022-05-11
CHO, SOON CHEON
Executed: 2022-05-11
LEE, SANG JEONG
Executed: 2022-05-11
JO, HYUN WOO
Executed: 2022-05-11
PARK, JONG WON
Executed: 2022-05-11
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method Using the Same