Patent Assignment
Reel/Frame 060187/0265
Assignment of Assignor's Interest
Recorded: 2022-06-13
Pages: 7
Assignors
TAKAHASHI, HIROKI
Executed: 2022-05-18
KONDO, DAICHI
Executed: 2022-05-18
IMAMURA, YU
Executed: 2022-05-18
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Cleaning Device, Substrate Processing Apparatus, Break-in Device, Method for Estimating Number of Fine Particles Adhering to Substrate, Method for Determining Degree of Contamination of Substrate Cleaning Member, and Method for Determining Break-in Processing