Patent Assignment
Reel/Frame 060191/0667
Assignment of Assignor's Interest
Recorded: 2022-06-14
Pages: 4
Assignors
AKIYAMA, TAKASHI
Executed: 2022-05-24
TAKAHASHI, TOMOHIRO
Executed: 2022-05-24
SASAKI, MITSUTOSHI
Executed: 2022-05-24
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus