Patent Assignment
Reel/Frame 060256/0786
Assignment of Assignor's Interest
Recorded: 2022-06-21
Pages: 3
Assignor
KOSHIMIZU, CHISHIO
Executed: 2022-06-14
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method