Patent Assignment
Reel/Frame 060315/0467
Assignment of Assignor's Interest
Recorded: 2022-06-09
Pages: 8
Assignors
TAKADA, HIROKI
Executed: 2022-04-08
SHINODA, KEN-ICHIRO
Executed: 2022-04-08
YASUNOBE, OSAMU
Executed: 2022-04-08
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Article Manufacturing Method