Patent Assignment
Reel/Frame 060363/0340
Assignment of Assignor's Interest
Recorded: 2022-06-30
Pages: 3
Assignors
DAMSMA, WIEBREN HARM
Executed: 2022-05-19
DEN HARTOG-BESSELINK, EDWIN
Executed: 2022-05-19
TER VRUGT, ERIK
Executed: 2022-05-19
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Semiconductor Substrate Processing Apparatus with a Temperature Sensor to Measure the Temperature of a Bearing