Patent Assignment
Reel/Frame 060384/0720
Assignment of Assignor's Interest
Recorded: 2022-05-19
Pages: 3
Assignor
CLARK, ROBERT
Executed: 2022-05-18
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Metalorganic Films for Extreme Ultraviolet Patterning