Patent Assignment
Reel/Frame 060579/0321
Assignment of Assignor's Interest
Recorded: 2022-07-21
Pages: 2
Assignor
LIN, SU-HORNG
Executed: 2013-11-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Mechanisms for Supplying Process Gas into Wafer Process Apparatus