Patent Assignment
Reel/Frame 060581/0311
Assignment of Assignor's Interest
Recorded: 2022-07-21
Pages: 22
Assignors
NAKABAYASHI, HAJIME
Executed: 2022-06-27
YAMAJI, TOMOHITO
Executed: 2022-07-12
YAMADA, KAZUKI
Executed: 2022-06-27
ASAKO, RYUICHI
Executed: 2022-06-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Pattern Formation Method and Photosensitive Hard Mask