Patent Assignment
Reel/Frame 060599/0529
Assignment of Assignor's Interest
Recorded: 2022-07-22
Pages: 4
Assignors
KIM, HYEONG KEUN
Executed: 2022-03-14
KIM, SEUL GI
Executed: 2022-03-14
KIM, HYUN MI
Executed: 2022-03-14
CHO, JIN WOO
Executed: 2022-03-14
SEONG, KI HUN
Executed: 2022-03-15
Assignee
KOREA ELECTRONICS TECHNOLOGY INSTITUTE
25, SAENARI-RO, BUNDANG-GU, SEONGNAM-SI, GYEONGGI-DO, 13509, KOREA, REPUBLIC OF
Covered Property
(1)
Pellicle for Extreme Ultraviolet Lithography Based on Yttrium