Patent Assignment
Reel/Frame 060599/0730
Assignment of Assignor's Interest
Recorded: 2022-07-22
Pages: 5
Assignors
HAN, LIREN
Executed: 2022-07-12
LI, BING
Executed: 2022-07-12
ZHAO, KEKE
Executed: 2022-07-12
PEI, LIXIN
Executed: 2022-07-12
BIAN, GUODONG
Executed: 2022-07-12
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE, BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Sputtering Reaction Chamber and Process Assembly of Sputtering Reaction Chamber