Patent Assignment
Reel/Frame 060772/0006
Assignment of Assignor's Interest
Recorded: 2022-08-10
Pages: 5
Assignor
GUAN, CHANGLE
Executed: 2022-07-28
Assignee
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
Covered Property
(1)
Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 10, 2022
From: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 060771/0965 →
Assignment of Assignor's Interest
Aug 10, 2022
From: LONG, MAOLIN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 060771/0991 →
Assignment of Assignor's Interest
Aug 10, 2022
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 060772/0014 →
Assignment of Assignor's Interest
Aug 19, 2022
From: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 061216/0234 →