Patent Assignment
Reel/Frame 060772/0014
Assignment of Assignor's Interest
Recorded: 2022-08-10
Pages: 5
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2022-07-29
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(3)
Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus
Application:
17/563,560 →
Publication:
US 2023/0071494
Lift Pin Assembly for a Plasma Processing Apparatus
Electrostatic Chuck Assembly for Plasma Processing Apparatus
Related Assignments
(7)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 10, 2022
From: LONG, MAOLIN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 060771/0991 →
Assignment of Assignor's Interest
Aug 10, 2022
From: LONG, MAOLIN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 060772/0033 →
Assignment of Assignor's Interest
Aug 10, 2022
From: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 060771/0965 →
Assignment of Assignor's Interest
Aug 10, 2022
From: GUAN, CHANGLE
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 060772/0028 →
Assignment of Assignor's Interest
Aug 10, 2022
From: GUAN, CHANGLE
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 060772/0006 →
Assignment of Assignor's Interest
Aug 10, 2022
From: LONG, MAOLIN; ZENG, WEIMIN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 060772/0043 →
Assignment of Assignor's Interest
Aug 19, 2022
From: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 061216/0234 →