Patent Assignment
Reel/Frame 060884/0132
Assignment of Assignor's Interest
Recorded: 2022-08-24
Pages: 2
Assignee
SINFONIA TECHNOLOGY CO., LTD.
1-30, SHIBADAIMON 1-CHOME, MINATO-KU, TOKYO, 1058564, JAPAN
Covered Property
(1)
Efem and Method of Controlling Supply Amount of Inert Gas