Patent Assignment
Reel/Frame 060967/0983
Assignment of Assignor's Interest
Recorded: 2022-09-01
Pages: 8
Assignors
INATOMI, YUICHIRO
Executed: 2022-08-16
HASHIMOTO, YUSAKU
Executed: 2022-08-17
NIWA, TAKAFUMI
Executed: 2022-08-31
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method