Patent Assignment
Reel/Frame 060987/0287
Assignment of Assignor's Interest
Recorded: 2022-09-05
Pages: 3
Assignors
OHTSU, AKIHIKO
Executed: 2022-07-11
YOSHIDOME, MASAHIRO
Executed: 2022-07-12
KAWADA, YUKIHISA
Executed: 2022-07-12
SAITO, RYO
Executed: 2022-07-14
Assignee
FUJIFILM CORPORATION
26-30, NISHIAZABU 2-CHOME, MINATO-KU,, TOKYO, 106-8620, JAPAN
Covered Property
(1)
Method for Inspecting Chemical Solution, Method for Producing Chemical Solution, Method for Controlling Chemical Solution, Method for Producing Semiconductor Device, Method for Inspecting Resist Composition, Method for Producing Resist Composition, Method for Controlling Resist Composition, and Method for Checking Contamination Status of Semiconductor Manufacturing Apparatus