Patent Assignment
Reel/Frame 060997/0006
Assignment of Assignor's Interest
Recorded: 2022-09-06
Pages: 5
Assignors
WEI, LIANG JU
Executed: 2022-09-02
CHIU, CHUNG-YI
Executed: 2022-09-02
WU, ZHEN
Executed: 2022-09-02
CHEN, HSUAN-HSU
Executed: 2022-09-02
CHEN, CHUN-LUNG
Executed: 2022-09-02
Assignee
UNITED MICROELECTRONICS CORP.
NO3, LI-HSIN RD.II, HSINCHU SCIENCE PARK, HSINCHU, 30078, TAIWAN
Covered Property
(1)
Control Method of Multi-Stage Etching Process and Processing Device Using the Same