Patent Assignment
Reel/Frame 061104/0350
Assignment of Assignor's Interest
Recorded: 2022-09-15
Pages: 8
Assignors
NAKAJIMA, KOICHI
Executed: 2022-09-13
CHIDA, SATOSHI
Executed: 2022-09-14
CHINO, SATOSHI
Executed: 2022-09-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Method of Cleaning Electrostatic Chuck and Method of Manufacturing Semiconductor Device While Exposing Electrostatic Chuck to Plasma and Introducing Electron Current