Patent Assignment
Reel/Frame 061198/0460
Assignment of Assignor's Interest
Recorded: 2022-09-23
Pages: 3
Assignors
FISCHER, ANDREAS
Executed: 2021-03-04
ROUTZAHN, AARON LYNN
Executed: 2021-03-03
LILL, THORSTEN BERND
Executed: 2021-03-03
VARADARAJAN, SESHASAYEE
Executed: 2021-03-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching of Molybdenum