Patent Assignment
Reel/Frame 061494/0667
Assignment of Assignor's Interest
Recorded: 2022-10-21
Pages: 3
Assignor
ITO, KOEI
Executed: 2022-10-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Inner Chamber