Patent Assignment
Reel/Frame 061504/0430
Assignment of Assignor's Interest
Recorded: 2022-10-22
Pages: 5
Assignors
LIU, CHIH-CHENG
Executed: 2022-10-16
WENG, MING-HUI
Executed: 2022-10-06
LI, JR-HUNG
Executed: 2022-10-06
CHENG, YAHRU
Executed: 2022-10-11
YANG, CHI-MING
Executed: 2022-10-06
LEE, TZE-LIANG
Executed: 2022-10-06
CHANG, CHING-YU
Executed: 2022-10-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device and Pattern Formation Method