Patent Assignment
Reel/Frame 061514/0464
Assignment of Assignor's Interest
Recorded: 2022-10-24
Pages: 6
Assignors
YAMAUCHI, TAKASHI
Executed: 2020-04-09
KAWAKAMI, SHINICHIRO
Executed: 2020-04-09
ENOMOTO, MASASHI
Executed: 2020-04-13
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Method for Forming Mask Pattern, Storage Medium, and Apparatus for Processing Substrate