Patent Assignment
Reel/Frame 061516/0185
Assignment of Assignor's Interest
Recorded: 2022-10-24
Pages: 3
Assignors
TANG, LUNG-YIN
Executed: 2022-08-08
LIN, TSUNG-MIN
Executed: 2022-08-03
LIANG, HSIN-SHENG
Executed: 2022-10-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Calibration Hardware for Ion Implanter