Patent Assignment
Reel/Frame 061525/0022
Assignment of Assignor's Interest
Recorded: 2022-10-25
Pages: 4
Assignors
TAKAHASHI, RUI
Executed: 2021-03-12
LI, YILUN
Executed: 2021-03-11
HUDSON, ERIC A.
Executed: 2021-03-12
OH, YOUN-JIN
Executed: 2021-03-11
LEE, WONJAE
Executed: 2021-03-12
BELAU, LEONID
Executed: 2021-03-11
SERINO, ANDREW CLARK
Executed: 2021-03-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
High Aspect Ratio Dielectric Etch with Chlorine