Patent Assignment
Reel/Frame 061527/0809
Assignment of Assignor's Interest
Recorded: 2022-10-25
Pages: 10
Assignee
HOYA CORPORATION
6-10-1 NISHI-SHINJUKU, SHINJUKU-KU, TOKYO, 160-8347, JAPAN
Covered Property
(1)
Mask Blank Substrate, Substrate with Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, and Method of Manufacturing Semiconductor Device