Patent Assignment
Reel/Frame 061674/0484
Assignment of Assignor's Interest
Recorded: 2022-11-07
Pages: 8
Assignors
FUJITA, SENA
Executed: 2022-10-27
MITSUNARI, TADASHI
Executed: 2022-10-27
KIKUCHI, TAKAMICHI
Executed: 2022-10-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus