Film forming method and film forming apparatus
A film forming method includes: supplying a liquid to a concave portion of a substrate whose surface includes the concave portion and a convex portion which are adjacent to each other; and selectively forming a film on a top surface of the convex portion of the surface of the substrate by supplying a processing gas, which chemically changes the liquid, to the surface of the substrate, and moving the liquid from the concave portion to the top surface of the convex portion by a reaction between the processing gas and the liquid.
1 . A film forming method comprising:
supplying a liquid to a concave portion of a substrate whose surface includes the concave portion and a convex portion which are adjacent to each other; and
selectively forming a film on a top surface of the convex portion of the surface of the substrate by supplying a processing gas, which chemically changes the liquid, to the surface of the substrate, and moving the liquid, which is in a liquid state, from the concave portion to the top surface of the convex portion by a reaction between the processing gas and the liquid.
2 . The film forming method of claim 1 , wherein the liquid is a halide.
3 . The film forming method of claim 2 , wherein the supplying the liquid to the concave portion includes forming the liquid by a reaction between a raw material gas of the halide and a reaction gas that reacts with the raw material gas.
4 . The film forming method of claim 3 , wherein the supplying the liquid to the concave portion includes:
plasmarizing both the raw material gas and the reaction gas when simultaneously supplying the raw material gas and the reaction gas; and
plasmarizing the reaction gas when alternately supplying the raw material gas and the reaction gas.
5 . The film forming method of claim 1 , wherein the liquid is an ionic liquid.
6 . The film forming method of claim 1 , wherein the liquid is liquid metal.
7 . The film forming method of claim 1 , wherein the liquid is a liquid polymer.
8 . The film forming method of claim 1 , wherein the liquid is supplied to the concave portion of the substrate by a spin coating method.
9 . The film forming method of claim 7 , wherein the liquid is synthesized inside a processing container that accommodates the substrate, and is supplied to the concave portion of the substrate.
10 . The film forming method of claim 1 , wherein the processing gas that chemically changes the liquid contains an element to be introduced into the liquid.
11 . The film forming method of claim 10 , wherein the processing gas that chemically changes the liquid includes an oxygen-containing gas.
12 . The film forming method of claim 10 , wherein the processing gas that chemically changes the liquid includes a nitrogen-containing gas.
13 . The film forming method of claim 10 , wherein the processing gas that chemically changes the liquid includes a gas of hydride.
14 . The film forming method of claim 13 , wherein the hydride contains Si, Ge, B, C, or P.
15 . The film forming method of claim 1 , wherein the processing gas that chemically changes the liquid degases an element that constitutes the liquid.
16 . The film forming method of claim 15 , wherein the processing gas that chemically changes the liquid includes a reducing gas.
17 . The film forming method of claim 16 , wherein the reducing gas is a hydrogen gas or a deuterium gas.
18 . The film forming method of claim 1 , wherein the selectively forming the film on the top surface of the convex portion includes plasmarizing the processing gas that chemically changes the liquid.
19 . The film forming method of claim 1 , comprising:
repeating the supplying the liquid to the concave portion and the selectively forming the film on the top surface of the convex portion.
20 . The film forming method of claim 1 , further comprising:
modifying the film formed on the top surface of the convex portion.
21 . The film forming method of claim 1 , wherein a temperature of the substrate is lower than a decomposition point of the liquid when the liquid is supplied to the concave portion.