Patent Assignment
Reel/Frame 061706/0984
Assignment of Assignor's Interest
Recorded: 2022-11-09
Pages: 8
Assignors
HANE, HIDEOMI
Executed: 2022-11-07
KURIBAYASHI, AKIHIRO
Executed: 2022-11-07
FUKIAGE, NORIAKI
Executed: 2022-11-07
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Method and Film Deposition Apparatus