Patent Assignment
Reel/Frame 061761/0904
Assignment of Assignor's Interest
Recorded: 2022-11-14
Pages: 12
Assignors
OKITA, YUJI
Executed: 2022-10-20
NAOHARA, HIDEJI
Executed: 2022-10-20
KAKUMA, HIROAKI
Executed: 2022-10-18
MASUI, TATSUYA
Executed: 2022-11-07
DEBA, YUICHI
Executed: 2022-10-28
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus