Patent Assignment
Reel/Frame 061806/0059
Assignment of Assignor's Interest
Recorded: 2022-11-17
Pages: 5
Assignors
LOMBARDO, JEFFREY JOHN
Executed: 2019-01-10
ALBRIGHT, RONALD PETER
Executed: 2019-01-10
HALL, DANIEL LESLIE
Executed: 2019-01-10
PEREZ-FALCON, VICTOR ANTONIO
Executed: 2019-01-10
JUDGE, ANDREW
Executed: 2019-01-10
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Apparatus for and Method of in-Situ Particle Removal in a Lithography Apparatus