Patent Assignment
Reel/Frame 061906/0389
Assignment of Assignor's Interest
Recorded: 2022-11-29
Pages: 6
Assignors
SONG, JUNGHYUN
Executed: 2022-11-18
SUL, ANSOOK
Executed: 2022-11-18
KANG, JEONGHUN
Executed: 2022-11-22
CHOI, DONOK
Executed: 2022-11-22
PARK, SUNG YONG
Executed: 2022-11-22
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and a Method of Processing a Substrate Using the Same