Patent Assignment
Reel/Frame 061911/0765
Assignment of Assignor's Interest
Recorded: 2022-11-29
Pages: 5
Assignors
HART, AMELIA HEATHER-SARAH CHURCH
Executed: 2022-11-29
O'NEILL, JAMES
Executed: 2022-11-29
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Pellicle Comprising Silicon Carbide Nanostructure and Related Devices and Methods