Patent Assignment
Reel/Frame 061913/0317
Assignment of Assignor's Interest
Recorded: 2022-11-29
Pages: 3
Assignors
HE, BO-CHING
Executed: 2022-11-01
LIU, CHUN-TING
Executed: 2022-11-01
FU, WEI-EN
Executed: 2022-11-01
WU, WEN-LI
Executed: 2022-11-01
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
195, SEC. 4, CHUNG HSING RD., CHUTUNG, HSINCHU, 310401, TAIWAN
Covered Property
(1)
X-Ray Reflectometry Apparatus and Method Thereof for Measuring Three Dimensional Nanostructures on Flat Substrate