Patent Assignment
Reel/Frame 062046/0784
Assignment of Assignor's Interest
Recorded: 2022-12-09
Pages: 4
Assignors
TAN, SAMANTHA SIAMHWA
Executed: 2020-04-23
PETER, DANIEL
Executed: 2020-04-23
BALAN, ARUNIMA DEYA
Executed: 2020-04-23
LEE, YOUNGHEE
Executed: 2020-04-23
PAN, YANG
Executed: 2020-04-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Selective Etch Using Deposition of a Metalloid or Metal Containing Hardmask