Patent Assignment
Reel/Frame 062141/0837
Assignment of Assignor's Interest
Recorded: 2022-12-19
Pages: 5
Assignor
IWAMOTO, DAIKI
Executed: 2022-10-04
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Method and Computer Program Product for Identifying Element Which Limits Throughput of Plating Apparatus