Patent Assignment
Reel/Frame 062191/0957
Assignment of Assignor's Interest
Recorded: 2022-12-22
Pages: 5
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Stage Apparatus, Lithography Apparatus and Article Manufacturing Method