Patent Assignment
Reel/Frame 062248/0537
Assignment of Assignor's Interest
Recorded: 2022-12-31
Pages: 4
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Methods for Forming a Topographically Selective Silicon Oxide Film by a Cyclical Plasma-Enhanced Deposition Process