Patent Assignment
Reel/Frame 062298/0262
Assignment of Assignor's Interest
Recorded: 2023-01-06
Pages: 5
Assignors
AOKI, YUSUKE
Executed: 2022-11-28
ITOH, SHUN
Executed: 2022-12-09
FUSE, YOSHIKI
Executed: 2022-11-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Method, Substrate Processing Method and Plasma Processing Apparatus