Patent Assignment
Reel/Frame 062319/0335
Assignment of Assignor's Interest
Recorded: 2023-01-09
Pages: 10
Assignors
OTA, KAZUKI
Executed: 2022-11-24
MIYAHARU, TAKAFUMI
Executed: 2022-11-24
SAITO, YUKI
Executed: 2022-11-24
IMAI, MASAKI
Executed: 2022-11-24
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus, Exposure Method, and Method of Manufacturing Article